11/4/2010	10:17:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2010	10:17:58 AM	Recipe started at 10:17 AM
11/4/2010	10:17:58 AM	Helium valve closed
11/4/2010	10:17:58 AM	H2 valve closed
11/4/2010	10:17:58 AM	BCl3 valve closed
11/4/2010	10:17:58 AM	PH3 valve closed
11/4/2010	10:17:58 AM	SiCl4 pre valve closed
11/4/2010	10:17:58 AM	SiCl4 post valve closed
11/4/2010	10:17:58 AM	Main Vac valve closed
11/4/2010	10:17:58 AM	Bubbler valve closed
11/4/2010	10:17:58 AM	Bypass valve opened
11/4/2010	10:17:58 AM	Helium MFC set to  0.000000
11/4/2010	10:17:58 AM	H2 MFC set to  0.000000
11/4/2010	10:17:58 AM	BCl3 MFC set to  0.000000
11/4/2010	10:17:58 AM	PHl3 MFC set to  0.000000
11/4/2010	10:17:58 AM	SiCl4 MFC set to  0.000000
11/4/2010	10:17:58 AM	Bypass solenoid MFC set to  0.000000
11/4/2010	10:17:58 AM	Tube furnace set to 0
11/4/2010	10:18:51 AM	Helium valve closed
11/4/2010	10:18:51 AM	H2 valve closed
11/4/2010	10:18:51 AM	BCl3 valve closed
11/4/2010	10:18:51 AM	PH3 valve closed
11/4/2010	10:18:51 AM	SiCl4 pre valve closed
11/4/2010	10:18:51 AM	SiCl4 post valve closed
11/4/2010	10:18:51 AM	Bubbler valve closed
11/4/2010	10:18:51 AM	Main Vac valve opened
11/4/2010	10:18:51 AM	Bypass valve opened
11/4/2010	10:18:51 AM	Helium MFC set to  0.000000
11/4/2010	10:18:51 AM	H2 MFC set to  0.000000
11/4/2010	10:18:51 AM	BCl3 MFC set to  0.000000
11/4/2010	10:18:51 AM	PHl3 MFC set to  0.000000
11/4/2010	10:18:51 AM	SiCl4 MFC set to  0.000000
11/4/2010	10:18:51 AM	Bypass solenoid MFC set to  0.000000
11/4/2010	10:18:51 AM	Tube furnace set to 0
11/4/2010	10:18:52 AM	Run finished at 10:18 AM
11/4/2010	10:18:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2010	10:28:42 AM	Bypass valve closed
11/4/2010	10:28:43 AM	Main Vac valve closed
